CAM-Workshop Program 2025

Day 1 (20. May 2025)

Session A: Welcome and Keynotes

09:00 – 09:40 Prof. Dr. Erica Lilleodden /  Frank Altmann Fraunhofer IMWS (DE) Welcome
09:40 – 10:00 Albert Heuberger Fraunhofer IIS (DE) Keynote: The APECS Pilot Line: European Chiplet Innovation
10:00 – 10:40 Kristof Croes IMEC (BE) Keynote: Reliability challenges of Silicon Photonic devices and its related Failure Analysis challenges
10:40 – 11:20 Mikel Azpeitia Urquia ST Microelectronics (IT) Keynote: MEMS: Smart sensors for a sustainable AI

Session B: MEMS & Sensors

11:20 – 11:40 Holger Pfaff Infineon Technologies (DE) Micromechanics without walking the plank- MEMS characterization at Infineon Regensburg
11:40 – 12:00 Roy Knechtel University of Applied Sciences Schmalkalden (DE) Understanding Wafer Bonded MEMS by (Failure) Analysis
12:00 – 12:20 Georg Spanring AMS-Osram AG (AT) Pinpointing Leakage Defects in TSVs: A Refined Failure Analysis Approach
12:20 – 12:40 Bernd Hähnlein CiS Forschungsinstitut für Mikrosensorik (DE) Implantation related crystallographic defects in pressure sensors

Session C: Emerging Fault Isolation Techniques

14:00 – 14:20 Neel Leslie Thermo Fisher Scientific (US) Exploring the Capabilities and Applications of E-beam probing for Failure Analysis
14:20 – 14:40 Michael Di Battista Varioscale Inc. (US) Innovative Approaches to Ultra Thinning Silicon to Enabling New Insights in IC Failure Analysis
14:40 – 15:00 Pascal Limbecker GlobalFoundries Dresden Module One LLC & Co. KG (DE) Challenges for Nanoprobing of 22nm FDSOI devices
15:00 – 15:20 Sebastian Brand Fraunhofer IMWS (DE) Precise 3D Defect Localization in quantitative Lock-in Thermography by analyzing the spatial phase distribution
15:20 – 15:40 Shimpei Tominaga Hamamatsu (JP) Application to a failure analysis of Visible ThermoDynamic ® Imaging
15:40- 16:00 Marc van Veenhuizen NXP (NL) RF-LIT background and use cases

Session D: Vendor FA Road Map

16:40 – 16:50 Kohei Kudo Hamamatsu Photonics K.K.(JP) Hamamatsu FA roadmap
16:50 – 17:00 Steffen Sturm InfraTec GmbH Infrarotsensorik und Messtechnik (DE) HD Lock-in Thermography for Failure Analysis in Electronics
17:00 – 17:10 Marc Heinemann SmarAct Metrology GmbH & Co. KG (DE) Minimizing Electron Dose during Nanoprobing
17:10 – 17:20 Chris Richardson Allied High Tech Products (US) TBD
17:20 – 17:30 Oytun Tasgit 3D-Micromac AG (DE) Efficiency Meets Precision: Advanced Laser Solutions for Sample Preparation
17:30 – 17:40 Libor Strakos Thermo Fisher Scientific Brno s.r.o (CZ) Thermo Fisher Scientific FA Road Map
17:40 – 17:50 TBD
17:50 – 18:00 NN TESCAN GROUP, a.s (CZ) TBD

Day 2 (21. May 2025)

Session E: Tutorial

Session G: AI Applications and FA Workflows

13:40 – 14:20 Konstantin Schekotihin  University Klagenfurt (AT) Keynote: Towards a Sustainable AI Lifecycle in FA Labs
14:20 – 14:40 Sebastian Stolwijk  Robert Bosch GmbH (DE) Automated Infrared Microscopy Workflow – Image Acquisition and AI Anomaly Detection
14:40 – 15:00 Kenneth Braakman NXP Semiconductors (NL) Leveraging Machine Signals for Device-Level Quality Detection and Automatic Root Cause Analysis in Semiconductor Wire Bonding
15:00 – 15:20 Bernhard Fichtl  Carl Zeiss Microscopy GmbH (DE) Speeding up FA workflows by AI – first results from the FA2IR project
15:20 – 15:40 Amit-Kumar Choudhary Matworks GmbH (DE) Digital workflows and ML techniques to optimize failure analysis in microelectronics
15:40 – 16:00 Lorenz Heinemann Fraunhofer IMWS (DE) Simplifying ML-Based Signal Analysis in FA by Removing Equipment Related Transfer Properties
16:00 – 16:20 David Stefan Kleindiek Kleindiek Nanotechnik (DE) Enhancing Semiconductor Nanoprobing procedures with AI-Driven Tip Detection
16:20 – 16:40 Christoph Maier Infineon Technologies AG (DE) Failure Analysis Ontology for structuring FA knowledge and meta data in a machine and human readable format