Naumann
19. May 2026 14:40 – 15:00 3D Heterogeneous Integration Local material characterization for heterogeneous system integration using nanoindentation techniques Falk Naumann Fraunhofer IMWS I Germany Abstract Application-relevant and accurate material parameters or degradation models are essential for numerical reliability assessments of microelectronic devices. The required properties are often technology- or process-specific and can deviate significantly…