19. May 2026

11:00 – 11:20

3D Heterogeneous Integration

Defect characterization of hybrid bonded systems

Christopher Benndorf

Fraunhofer IMWS I Germany

Abstract

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Biography

Studied chemistry, followed by a PhD in inorganic solid-state chemistry and physical chemistry at Westfälische Wilhelms-Universität Münster, with a focus on solid-state NMR spectroscopy of intermetallic phases and polypnictides.
Research associate and junior research group leader at University of Leipzig (2017–2024).
Since 2024, researcher at the Fraunhofer Institute for Microstructure of Materials and Systems IMWS in Halle (Saale), focusing on ToF-SIMS and TEM as tools for failure analysis in microelectronics and wafer bonding.