Heinemann

Abstract, SessionD

20. May 2025 17:00 – 17:10 Vendor Session Minimizing Electron Beam Exposure to the Sample During Nanoprobing Marc Heinemann SmarAct Metrology I Germany Abstract Electrical probing of transistors at advanced technology nodes requires precise alignment of the probe and the sample. This is typically performed within a scanning electron microscope (SEM) to visualize the probe…

Sturm

Abstract, SessionD

20. May 2025 16:50 – 17:00 Vendor Session HD Lock-in Thermography for Failure Analysis in Electronics Steffen Sturm InfraTec GmbH I Germany Abstract Lock-in thermography allows failure inspection in electronics by detection of inhomogeneous temperature distribution and local power loss in 2 dimensional and 3 dimensional way. This is achieved by using the shortest measurement…