Li
20. May 2026 11:40 – 12:00 Advanced Failure Analyse Techniques Ultra-Thin Ga-Free Lamella Preparation Enabling Pristine Structural-Chemical Analysis of Advanced Technology Nodes Letian Li ThermoFisher Scientific I The Netherlands Abstract Ultra-thin, precisely targeted lamella preparation on advanced IC devices has traditionally been considered a Ga-FIB application. However, recent advances in semiconductor processing now require gallium-free…