Haehnlein
20. May 2025 12:20 – 12:40 MEMS & Sensors Implantation related crystallographic defects in pressure sensors Bernd Haehnlein CiS Forschungsinstitut für Mikrosensorik I Germany Abstract Pressure sensors based on silicon have proven to be robust for a wide range of operating conditions. However, maintaining the electromechanical device parameters as well as their stability is of…