Pfaff
20. May 2025 11:20 – 11:40 MEMS & Sensors Micromechanics without walking the plank- MEMS characterization at Infineon Regensburg Holger Pfaff Infineon Technologies I Germany Abstract MEMS have revolutionized sensor applications over the past three decades, ranging from smart environmental monitoring in phones (pressure, acceleration, voice recognition) to life-saving technologies (airbags, health monitoring). The fundamental…